A liquid deposition source delivery system (22) includes a reactant source (50) of a liquid chemical reactant, a first heater (54) positioned adjacent to the reactant source (50) , and a vapor collection system (56) in communication with the reactant source (50) to collect vapor evolved from the reactant...http://www.google.es/patents/US5455014?utm_source=gb-gplus-sharePatente US5455014 - Liquid deposition source gas delivery system
