A structure and method are provided for forming a collar surrounding a portion of a trench in a semiconductor substrate, the collar having a lower edge self-aligned to a top edge of a buried plate disposed adjacent to a lower portion of the trench....http://www.google.es/patents/US7223669?utm_source=gb-gplus-sharePatente US7223669 - Structure and method for collar self-aligned to buried plate
Structure and method for collar self-aligned to buried plate
