Disclosed is a method of manufacturing a mask for conductive wirings in a semiconductor device, wherein the conductive wirings are formed on a semiconductor substrate of the semiconductor device, comprising the steps of: (a) calculating data for the entire regions of the semiconductor substrate on which...http://www.google.es/patents/US6487712?utm_source=gb-gplus-sharePatente US6487712 - Method of manufacturing mask for conductive wirings in semiconductor device
Method of manufacturing mask for conductive wirings in semiconductor device
