Various embodiments provide improved processes and systems that produce a barrier layer with decreasing nitrogen concentration with the increase of film thickness. A barrier layer with decreasing nitrogen concentration with film thickness allows the end of barrier layer with high nitrogen concentration...http://www.google.es/patents/US7863179?utm_source=gb-gplus-sharePatente US7863179 - Methods of fabricating a barrier layer with varying composition for copper metallization
Methods of fabricating a barrier layer with varying composition for copper ...
