Provided is a liquid processing apparatus (method) that forms a coating film by supplying and pouring a coating solution from a coating solution nozzle onto a surface of a substrate held substantially horizontally by a substrate holder. In the liquid processing apparatus (method), a unit for photographing...http://www.google.es/patents/US20100098869?utm_source=gb-gplus-sharePatente US20100098869 - LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
