An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween...http://www.google.es/patents/US5367429?utm_source=gb-gplus-sharePatente US5367429 - Electrostatic type micro transducer and control system using the same
Electrostatic type micro transducer and control system using the same
