Methods and apparatus are provided for monitoring deposition and pre-deposition characteristics such as the growth rates, oxide desorption, surface reconstruction, anion surface exchange reaction and smoothness of the surface of rotating substrates in near real-time during molecular beam epitaxy by...http://www.google.es/patents/US5772758?utm_source=gb-gplus-sharePatente US5772758 - Near real-time extraction of deposition and pre-deposition characteristics from rotating substrates and control of a deposition apparatus in near real-time
Near real-time extraction of deposition and pre-deposition characteristics ...
