A method of fabricating a Ti-containing liner having good contact resistance and coverage of a contact hole is provided. The method which converts an amorphous region of ionized metal plasma deposited Ti into a substantially crystalline region includes (a) providing a structure having at least one contact...http://www.google.es/patents/US6387790?utm_source=gb-gplus-sharePatente US6387790 - Conversion of amorphous layer produced during IMP Ti deposition
Conversion of amorphous layer produced during IMP Ti deposition
