A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to an upper surface of the support layer and another portion in parallel with the fixed...http://www.google.es/patents/US6952965?utm_source=gb-gplus-sharePatente US6952965 - Vertical MEMS gyroscope by horizontal driving
