A monolithic silicon mass flow control structure is made by etching process to form a valve structure and a channel in a silicon chip, laser or electric discharge process to form a flow inlet and a flow outlet in a glass chip, and anode connection process to combine the silicon chip and the glass chip....http://www.google.es/patents/US6124632?utm_source=gb-gplus-sharePatente US6124632 - Monolithic silicon mass flow control structure
