A process for treating a copper or copper alloy substrate surface with a composition and corrosion inhibitor solution to minimize defect formation and surface corrosion, the method including applying a composition including one or more chelating agents, a pH adjusting agent to produce a pH between about...http://www.google.es/patents/US7104267?utm_source=gb-gplus-sharePatente US7104267 - Planarized copper cleaning for reduced defects
