The invention relates to an interferometer arrangement (1000) having at least one measuring beam path for providing light in an object area, at least one reference beam path and at least one unit for superposing light of the measuring beam path with light of the reference beam path and a unit for detecting...http://www.google.es/patents/US7016046?utm_source=gb-gplus-sharePatente US7016046 - Interferometer arrangement and interferometric measuring method
Interferometer arrangement and interferometric measuring method
