An method for creating an image on a photosensitive material with enhanced inside corner resolution using a raster scan exposure system. The photosensitive material may comprise a layer of an unexposed photomask. An energy beam scan is extended by one or more addressable locations beyond the boundaries...http://www.google.es/patents/US6567719?utm_source=gb-gplus-sharePatente US6567719 - Method and apparatus for creating an improved image on a photomask by negatively and positively overscanning the boundaries of an image pattern at inside corner locations
Method and apparatus for creating an improved image on a photomask by ...
