A compact electrostatic comb actuator is disclosed for microelectromechanical (MEM) applications. The actuator is based upon a plurality of meshed electrostatic combs, some of which are stationary and others of which are moveable. One or more restoring springs are fabricated within an outline of the...http://www.google.es/patents/US6133670?utm_source=gb-gplus-sharePatente US6133670 - Compact electrostatic comb actuator
