An integrated circuit device, e.g., a memory device, includes a substrate, and a plurality of rows of active regions in the substrate, the active regions arranged in a staggered pattern such that active regions of a first row are aligned with portions of an isolation region separating active regions...http://www.google.es/patents/US7250335?utm_source=gb-gplus-sharePatente US7250335 - Methods of fabricating integrated circuit devices including self-aligned contacts with increased alignment margin
Methods of fabricating integrated circuit devices including self-aligned ...
