A micro-electromechanical fluid ejector having an inner structure on the bottom of the top of the membrane for isolating the conductor, and an outer structure, away from the center of the membrane, on the bottom of the top of the membrane to stop excessive flexing of the membrane leading to inter-electrode...http://www.google.es/patents/US6467879?utm_source=gb-gplus-sharePatente US6467879 - Method and apparatus for preventing degradation of electrostatically actuated devices
Method and apparatus for preventing degradation of electrostatically ...
