A semiconductor device includes a semiconductor substrate and a capacitor which is disposed on a principal surface of the semiconductor substrate. The capacitor includes a lower electrode film disposed on the principal surface of the semiconductor substrate, a dielectric film disposed on the lower electrode...http://www.google.es/patents/US7868420?utm_source=gb-gplus-sharePatente US7868420 - Semiconductor device which includes a capacitor and an interconnection film coupled to each other and a manufacturing method thereof
Semiconductor device which includes a capacitor and an interconnection film ...
