An apparatus for electrostatically pumping fluids without passing the fluids through the electric field of the pump is contemplated. Electrostatic forces are preferably used to move the diaphragms in one direction, while elastic and/or other restorative forces are used to move the diaphragms back to...http://www.google.es/patents/US6729856?utm_source=gb-gplus-sharePatente US6729856 - Electrostatically actuated pump with elastic restoring forces
Electrostatically actuated pump with elastic restoring forces