A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning...http://www.google.es/patents/US5703728?utm_source=gb-gplus-sharePatente US5703728 - Support post architecture for micromechanical devices
Support post architecture for micromechanical devices
