A capacitive pressure sensor suitable for making highly sensitive, low pressure measurements is disclosed. The sensor may be mounted into a 0.5 mm OD catheter suitable for multipoint pressure measurements from within the coronary artery of the heart. The sensor employs a tranducer which consists of a...http://www.google.es/patents/US5013396?utm_source=gb-gplus-sharePatente US5013396 - Method of making an ultraminiature pressure sensor
Method of making an ultraminiature pressure sensor