A measuring apparatus for irradiating measuring light and for measuring optical performance of a target optical system includes a barrel for housing the target optical system, the barrel being rotatable around an optical axis of the target optical system, and an illumination optical system for introducing...http://www.google.es/patents/US7098467?utm_source=gb-gplus-sharePatente US7098467 - Measuring method and apparatus, exposure method and apparatus, and device manufacturing method
Measuring method and apparatus, exposure method and apparatus, and device ...
