The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion....http://www.google.es/patents/US6314974?utm_source=gb-gplus-sharePatente US6314974 - Potted transducer array with matching network in a multiple pass configuration
Potted transducer array with matching network in a multiple pass configuration
