There is provided a method of making a gap between first and second objects have a predetermined value. The method includes steps of introducing light to an entry window on the first object, detecting an intensity of light from an exit window on the first object, the exit window being at such a position...http://www.google.es/patents/US7062010?utm_source=gb-gplus-sharePatente US7062010 - Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus
Method for adjusting gap between two objects and exposure method using the ...
