A semiconductor acceleration sensor, which prevents an adhesion of a movable electrode to a first or second fixed electrode due to an electrostatic attracting force generated therebetween. The sensor has a weight portion and movable electrodes formed on both sides of which, and first and second fixed...http://www.google.es/patents/US6494096?utm_source=gb-gplus-sharePatente US6494096 - Semiconductor physical quantity sensor
