Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication...http://www.google.es/patents/US20070097694?utm_source=gb-gplus-sharePatente US20070097694 - Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
Fabry-perot interferometric MEMS electromagnetic wave modulator with zero ...
Número de solicitud: 11/263,313 Número de publicación: US 2007/0097694 A1 Fecha de presentación: 31 Oct 2005 Patente emitida: US7760197 ( Fecha de emisión 20 Jul 2010)
