Microfabricated filters utilizing a bulk substrate structure and a thin film structure and a method for constructing such filters. The pores of the filters are defined by spaces between the bulk substrate structure and the thin film structure and are of substantially uniform width, length and distribution....http://www.google.es/patents/US6044981?utm_source=gb-gplus-sharePatente US6044981 - Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
Microfabricated filter with specially constructed channel walls, and ...
