A surface shape recognition apparatus includes a plurality of sensor electrodes, passivation film, capacitance detection circuit, and ground electrode. The sensor electrodes are formed on an interlevel insulator on a substrate and insulated from each other. The passivation film is formed on the interlevel...http://www.google.es/patents/US6714666?utm_source=gb-gplus-sharePatente US6714666 - Surface shape recognition apparatus
