Anti-reflective compositions and methods of using those compositions with low dielectric constant materials are provided. In one embodiment, the compositions include polymers comprising recurring monomers having unreacted epoxide groups. In another embodiment, the polymers further comprise recurring...http://www.google.es/patents/US6663916?utm_source=gb-gplus-sharePatente US6663916 - Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
Anti-reflective coating of polymer with epoxide rings reacted with light ...
