A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure...http://www.google.es/patents/US7038850?utm_source=gb-gplus-sharePatente US7038850 - CD metrology analysis using green's function
