A high precision automated wafer inspection station provides a base table area on which an X-Y stage is movable in mutually orthogonal directions relative to an inspection axis in alignment with a microscope or measuring instrument which is mounted on a bridge support above the table. The stage mechanism...http://www.google.es/patents/US4938654?utm_source=gb-gplus-sharePatente US4938654 - Automated wafer inspection system
