The invention consists of a camera, light sources, lenses and software algorithms that are used to image and inspect semiconductor structures, including through infrared radiation. The use of various configurations of solid state lighting and software algorithms enhances the imaging and inspection....http://www.google.es/patents/US8077305?utm_source=gb-gplus-sharePatente US8077305 - Imaging semiconductor structures using solid state illumination
Imaging semiconductor structures using solid state illumination
