A contactless sheet resistance measurement apparatus and method for measuring the sheet resistance of upper layer of ultra shallow p-n junction is disclosed. The apparatus comprises alternating light source optically coupled with first transparent and conducting electrode brought close to the wafer,...http://www.google.es/patents/US7737680?utm_source=gb-gplus-sharePatente US7737680 - Non contact method and apparatus for measurement of sheet resistance of P-N junctions
Non contact method and apparatus for measurement of sheet resistance of P-N ...
