An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element, and forcing member that applies a force to the at least one optical element in a non-contact manner....http://www.google.es/patents/US7426013?utm_source=gb-gplus-sharePatente US7426013 - Exposure apparatus and device fabrication method
