Radio frequency plasma coupling systems allow for controllable, uniform inductive coupling within a plasma reactor, as well as separately controllable, uniform capacitive coupling within the reactor. According to exemplary embodiments, a set of parallel coupling elements are positioned on a dielectric...http://www.google.es/patents/US6155199?utm_source=gb-gplus-sharePatente US6155199 - Parallel-antenna transformer-coupled plasma generation system
Parallel-antenna transformer-coupled plasma generation system
