A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode...http://www.google.es/patents/US7794611?utm_source=gb-gplus-sharePatente US7794611 - Micropump for integrated device for biological analyses
Micropump for integrated device for biological analyses
