Methods and apparatus for varying and measuring the position of a micromachined electrostatic actuator using a pulse width modulated (PWM) pulse train are disclosed. One or more voltage pulses are applied to the actuator. In each of the pulses, a voltage changes from a first state to a second state and...http://www.google.es/patents/US6674383?utm_source=gb-gplus-sharePatente US6674383 - PWM-based measurement interface for a micro-machined electrostatic actuator
PWM-based measurement interface for a micro-machined electrostatic actuator
