DMD projection light values for HDTV have various manufacturing requirements, including the high yield integration of the DMD superstructure on top of an underlying CMOS address circuit. The CMOS chip surface contains several processing artifacts that can lead to reduced yield for the DMD superstructure....http://www.google.es/patents/US5216537?utm_source=gb-gplus-sharePatente US5216537 - Architecture and process for integrating DMD with control circuit substrates
Architecture and process for integrating DMD with control circuit substrates