Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass...http://www.google.es/patents/US7434477?utm_source=gb-gplus-sharePatente US7434477 - Methods and apparatus for pressure compensation in a mass flow controller
Methods and apparatus for pressure compensation in a mass flow controller
