Apparatuses and methods for suppressing thermally induced motion of a workpiece. An apparatus includes a workpiece heating system configured to thermally induce motion of a workpiece, and further includes a damping member spaced apart from the workpiece and configured to apply a damping force to dampen...http://www.google.es/patents/US7501607?utm_source=gb-gplus-sharePatente US7501607 - Apparatuses and methods for suppressing thermally-induced motion of a workpiece
Apparatuses and methods for suppressing thermally-induced motion of a workpiece
