An effluent gas stream treatment system for treatment of gaseous effluents such as waste gases from semiconductor manufacturing operations. The effluent gas stream treatment system comprises a pre-oxidation treatment unit, which may for example comprise a scrubber, an oxidation unit such an electrothermal...http://www.google.es/patents/US7695700?utm_source=gb-gplus-sharePatente US7695700 - Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
Effluent gas stream treatment system having utility for oxidation treatment ...
