A thin film transistor (TFT) and the method of forming the same is provided. The method of forming the TFT on a surface of a substrate, includes the steps of: forming a gate electrode; deposing a gate dielectric on the gate electrode; forming a nanocrystalline silicon (nc-Si) layer and an amorphous silicon...http://www.google.es/patents/US20090212287?utm_source=gb-gplus-sharePatente US20090212287 - THIN FILM TRANSISTOR AND METHOD FOR FORMING THE SAME
THIN FILM TRANSISTOR AND METHOD FOR FORMING THE SAME
