The present invention relates to micro-mechanical devices including actuators, motors and sensors with improved operating characteristics. A micro-mechanical device (10) comprising a DMD-type spatial light modulator with a getter (100) located within the package (52). The getter (100) is preferably specific...http://www.google.es/patents/US5610438?utm_source=gb-gplus-sharePatente US5610438 - Micro-mechanical device with non-evaporable getter
Micro-mechanical device with non-evaporable getter
