A probe card for testing a semiconductor wafer, a test method, and a test system employing the probe card are provided. The probe card includes: a substrate; an interconnect slidably mounted to the substrate; and a force applying mechanism for biasing contacts on the interconnect into electrical engagement...http://www.google.es/patents/US6600334?utm_source=gb-gplus-sharePatente US6600334 - Force applying probe card and test system for semiconductor wafers
Force applying probe card and test system for semiconductor wafers
