A method of laser machining using an ultra-fast pulse laser is presented. According to the present invention a plurality of holes with a pitch less than the wavelength of the laser are drilled into a material sample. Reliable and reproducible hole drilling is accomplished through an exemplary drilling...http://www.google.es/patents/US6570122?utm_source=gb-gplus-sharePatente US6570122 - Apparatus for drilling holes with sub-wavelength pitch with laser
Apparatus for drilling holes with sub-wavelength pitch with laser