A method of depositing lithium phosphorus oxynitride on a substrate, the method comprising loading a substrate into a vacuum chamber having a target comprising lithium phosphate, introducing a process gas comprising nitrogen into the chamber and maintaining the gas at a pressure of less than about 15...http://www.google.es/patents/US6863699?utm_source=gb-gplus-sharePatente US6863699 - Sputter deposition of lithium phosphorous oxynitride material
Sputter deposition of lithium phosphorous oxynitride material
