A method for fabricating a capacitor includes forming an isolation layer over a cell region and a peripheral region of a substrate. The isolation layer forms a plurality of open regions in the cell region. Storage nodes are formed on surfaces of the open regions. A sacrificial pattern is formed over...http://www.google.es/patents/US8048758?utm_source=gb-gplus-sharePatente US8048758 - Method for fabricating a capacitor utilizes the sacrificial pattern covering the cell region
Method for fabricating a capacitor utilizes the sacrificial pattern covering ...
