Methods of forming dielectric structures are shown. Methods of forming dielectric structures are shown that include lutetium oxide and lanthanum aluminum oxide crystals embedded within the lutetium oxide. Specific methods shown include monolayer deposition which yields process improvements such as chemistry...http://www.google.es/patents/US8071443?utm_source=gb-gplus-sharePatente US8071443 - Method of forming lutetium and lanthanum dielectric structures
Method of forming lutetium and lanthanum dielectric structures
