A method and system for identifying a defect or contamination on a surface of a sample. The system operates by detecting changes in work function across a surface via both vCPD and nvCPD. It utilizes a non-vibrating contact potential difference (nvCPD) sensor for imaging work function variations over...http://www.google.es/patents/US7107158?utm_source=gb-gplus-sharePatente US7107158 - Inspection system and apparatus
