A system and method for mixing a plurality of gases for an atomic layer deposition (ALD) reactor. The mixer is configured to mix the plurality of gases while minimizing the potential for re-circulation within the mixer. The mixer is further configured to maintain the flow velocity of the plurality of...http://www.google.es/patents/US20050092247?utm_source=gb-gplus-sharePatente US20050092247 - Gas mixer and manifold assembly for ALD reactor
Número de solicitud: 10/929,348 Número de publicación: US 2005/0092247 A1 Fecha de presentación: 30 Ago 2004 Patente emitida: US8152922 ( Fecha de emisión 10 Abr 2012)
