A washing apparatus for performing a batch treatment of a plurality of wafers has a vessel and a wafer boat dedicated to the vessel and movable in the vertical direction. The boat has a fork, which supports the wafers in the vessel in a manner such that the wafers are spaced from one another at predetermined...http://www.google.es/patents/US5226437?utm_source=gb-gplus-sharePatente US5226437 - Washing apparatus
